Advanced Wafer Hotspot Detection through Image Segmentation and Stacked Model

Ali Raza; Julio César Martínez Espinosa; Debora L. Ramírez-Vargas; Muhammad Shafiq; Imran Ashraf

Resumen:

The wafer map is a data visualization of a thin semiconductor fabric made of crystalline silicon, such as defects or test results. The wafer map is a base for creating electronic coordinate circuits and photovoltaic cells. During the wafer map production, any fault results in a product failure. The wafer map faults are undetectable to the naked eye, which is a big challenge. Hotspot detection in wafer maps is significantly important to evaluate the manufacturing process and. improve product yield. The hotspot detection in the wafer maps is the primary aim of this research. A novel wafer map hotspot detector (WHD) is proposed based on three stack fully connected conventional neural network layers and a dense layer. Data augmentation uses the segmented images of the wafers to build the proposed model. The proposed model is evaluated through several evalua-tion parameters and state-of-the-art studies comparative analysis. The proposed model achieved a 94% training and 90% testing performance accuracy for hotspot detection and shows better results than existing approaches. This study helps semiconductor engineers improve wafer manufacturing designs and efficiency in the semiconductor industry.