?url_ver=Z39.88-2004&rft_id=doi%3A10.1109%2FACCESS.2024.3422616&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aulast=Shahroz&rft.aufirst=Mobeen&rft.au=Shahroz%2C+Mobeen&rft.pages=92840-92855&rft.atitle=Hierarchical+Attention+Module-Based+Hotspot+Detection+in+Wafer+Fabrication+Using+Convolutional+Neural+Network+Model&rft.issn=2169-3536&rft.date=Julio+2024&rft.title=IEEE+Access&rft.volume=12&rft.genre=article